Hydrogen Peroxide in the Fab: Why Semiconductor Wastewater Needs a Cleaner Cleanup Step — and How Catalase Delivers It
Hydrogen peroxide (H₂O₂) is a workhorse in semiconductor wet processing — embedded across wafer cleaning, post-CMP polishing steps, and surface preparation. But the same chemistry that keeps wafers clean becomes a liability once it leaves the tool and enters the wastewater stream.
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